A variety of pressure sensor designs are available today. Two of the most common sensor types are MEMS and capacitive sensors.
MEMS stands for micro electromechanical system. MEMS sensors are any sensor manufactured using micro electric fabrication techniques. Because of their design, ambient electromagnetism and fluid dynamics are important to take into consideration as they affect the function of a MEMS sensor. Although MEMS are a popular choice, they are often not the best selection for OEM and other industrial applications.
Capacitanceis the ability of an object to hold an electrical charge, and capacitive transducers measure changes in this electrical charge.Capacitive transducers可能是最接近通用压力传感器样式的东西,可以在各种应用中使用。
MEMS Sensors |
Capacitive Transducers |
Built using a common silicon substrate
|
Compact housing contains two closely spaced, parallel, electrically isolated metallic plates
|
Performance limitations
|
Performance advantages
|